Patent · US Expired

Semiconductor etalon device, optical control system and method

US6349156B1 · kind B1 · utility

27Cited by
5References
29Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 28, 1999
Grant dateFeb 19, 2002
Priority date
Expiry dateOct 28, 2019

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B2006/12123
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A semiconductor device is provided with at least two photodetectors and an interposed etalon. Signals from the photodetectors may be compared to generate a control signal. The control signal may be used for wavelength control and/or stabilization and for other purposes. According to a preferred embodiment, the etalon is formed of at least two distributed Bragg reflectors. The etalon provides high discrimination power. In addition, the etalon has a periodic discrimination function that may be matched to the periodic channels of a dense wavelength division multiplexing system. According to one aspect of the invention, electrical current may be applied to selected layers of the device to tune and/or shift the response of the device. If desired, the invention may be incorporated into a waveguide structure, such as an optical fiber. The present invention also relates to a wafer fusion technique for making integrated devices.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.