Patent · US Expired

Device and method for controlling the interaction of a tip and a sample, notably for atomic force microscopy and nano-indentation

US6349591B1 · kind B1 · utility

24Cited by
9References
2Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 13, 2000
Grant dateFeb 26, 2002
Priority date
Expiry dateJan 13, 2020

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S977/863
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A device for controlling the interaction of a tip and a sample includes a deformable element carrying the tip and means for positioning the tip with respect to the sample. The device also includes at lest two electrodes for creating an electrical field that exerts a force. The deformable element is preferably elastically deformable and includes advantageously a cantilever. According to a method for controlling the interaction of a tip and a sample, the tip carried by a deformable element is positioned with respect to the sample and the interaction of the tip and the sample is controlled by creating an electric field using a voltage between at least two electrodes. This electrical field exerts a force on the tip. Applications are to atomic force microscopy (AFM) and to nano-indentation measurements.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.