Micro-electro-opto-mechanical inertial sensor
US6350983B1 · kind B1 · utility
41Cited by
3References
20Claims
0Family size
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Key dates
| Filing date | Jul 21, 2000 |
| Grant date | Feb 26, 2002 |
| Priority date | — |
| Expiry date | Jul 21, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/093
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micro-electromechanical optical inertial sensing device comprises a CMOS chip (3), comprising at least one integrated photodiode (6) and analog electronics; an elastically suspended proof mass (1); and a light source (4). A light beam from the light source casts a partial shadow of the proof mass over the photodiode when the proof mass is at rest. When subjected to an inertial movement, the proof mass swings causing the partial shadow to shift and modulate the illumination of the photodiode. An output current signal from the photodiode is processed by the analog electronics to generate measurement results.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.