Transparent conductive laminate and electroluminescence light-emitting element using same
US6351068B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 13, 1996 |
| Grant date | Feb 26, 2002 |
| Priority date | — |
| Expiry date | Dec 13, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S428/917
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A transparent conductive laminate in which a transparent conductive layer (an ITO film) mainly comprising indium, tin and oxygen is formed on one main surface of a transparent substrate such as a polymeric film and which is excellent in moist heat resistance and scuff resistance and which can be applied to various kinds of transparent electrodes. The transparent conductive layer has a stable amorphous structure, and its resistivity is 1×l0−2 &OHgr;·cm or less, and its electron mobility is 20 cm2/(V·sec) or more. This transparent conductive laminate can be prepared by forming an amorphous film mainly comprising indium, tin and oxygen and having a resistivity of more than 1×10−2 &OHgr;·cm on the substrate by a sputtering process under a high oxygen concentration atmosphere, and then subjecting the film to a heat treatment in the range of 80 to 180° C. to decrease the resistivity to 1×10−2 &OHgr;·cm or less, while the amorphous structure is maintained. This transparent conductive laminate can suitably be utilized as the transparent electrode of an electroluminescence light-emitting element equipped with a layer contai…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.