Optical attenuator
US6351329B1 · kind B1 · utility
129Cited by
6References
16Claims
0Family size
Assignees
Inventor
Key dates
| Filing date | Oct 8, 1999 |
| Grant date | Feb 26, 2002 |
| Priority date | — |
| Expiry date | Oct 8, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/3594
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical attenuator having a structure in which a membrane covers a cavity formed on a substrate is disclosed. The membrane covering the cavity formed in the substrate is movable relative to the bottom surface of the cavity constituting a deformable mirror. Movement of the membrane relative to the bottom surface of the cavity attenuates optical signals impinging on the surface thereof. The movement of the membrane relative to the bottom surface of the cavity attenuates impinging optical signals by controlling the angle at which such impinging optical signals are reflected from the membrane surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.