Confocal measurement and diagnostic system
US6353216B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 18, 1997 |
| Grant date | Mar 5, 2002 |
| Priority date | — |
| Expiry date | Apr 18, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/0064
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A confocal optical system is disclosed that utilizes fiber optic components in its construction. The system includes a light source, two detection units, an aperture and an optical element all optically coupled to a fiber optic coupler via optical fibers. In addition, a novel automatic focusing device is disclosed which utilizes chromatic aberration to maintain a target object in optimal focus. The device includes two light sources having different wavelengths of light, an optical element, an aperture, two detection units and a beam splitter. One light source is used to achieve initial focus and to illuminate the target object. The second light source is used to maintain the target object in optical focus. Light reflected off the target object is measured by one of the detection units. The magnitude of the light of the second wavelength measured by the detection unit is utilized to maintain focus. A second detection units is utilized to measure the intensities of the two light sources to yield normalized results. Further, a method of diagnosing an optical system is also disclosed. The method includes comparing a current set of readings of light against a set of reference readings t…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.