Electrical temperature sensor having one or more layers

US6353381B1 · kind B1 · utility

Assignee

• Heraeus Electro-Nite International N.V. · BE

Inventors

• Stefan Dietmann · Haiterbach, DE
• Margit Sander · Karlstein, DE
• Christian Baerts · Beringen, BE
• Karlheinz Wienand · Aschaffenburg, DE

Key dates

• Filing date: Jul 15, 1999
• Grant date: Mar 5, 2002
• Expiry date: Jul 15, 2019

Classification

• Technology area (CPC G): Physics
• CPC primary: G01K7/183
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An electrical temperature sensor has a platinum-containing resistance layer as a measuring resistor, which is applied on the electrically insulating surface of a ceramic substrate. For protection against contamination or damage, the resistance layer is provided on its side facing away from the ceramic substrate with an intermediate layer as a diffusion barrier layer. In a first embodiment, a platinum layer as an electrode is applied on the intermediate layer spaced from the resistance layer. The electrode protects the measuring resistance against platinum poisons, such as stray silicon ions, which could emerge, for example, from a passivation layer made of glass. In a second embodiment, the electrical temperature sensor is provided with a multiple layer, wherein a covering layer is applied on the intermediate layer as a passivation layer made of glass. Also in this embodiment, an electrode in the form of a platinum layer can be applied spaced from the resistance layer. The intermediate layer functioning as a diffusion barrier layer is made of a ceramic containing Al2O3, MgO or tantalum oxide. Furthermore, it is also possible to insert an intermediate layer made of a layer system wi…