Sensor for a capillary tube of a mass flow meter
US6354150B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 24, 1998 |
| Grant date | Mar 12, 2002 |
| Priority date | — |
| Expiry date | Feb 24, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F1/692
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The sensor (7) for a mass flow meter (1) including a capillary tube (6) for circulation of fluid in parallel with the principal circuit of the fluid circulation. The sensor includes heating mechanisms (20) of the capillary tube (6) and mechanisms for measuring the temperature (22, 23), upstream and downstream from this heating mechanism (20), and separate from the heating mechanism. The mechanisms for measuring the temperature (22, 23) are two resistors manufactured by deposition in an external manner on the sensor tube (6), one of them (22) upstream from the heating mechanism (20), the other (23) downstream from the heating mechanism. The manufacturing process includes stages of deposition by an electron gun, firstly of a layer of zirconia (21) of several microns, on the tube (6) made of stainless steel, then of the sensitive components (27) and the contacts (31, 32) of the measurement resistors (22, 23), made of platinum, and defined by masks of nickel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.