Seal for wafer containers
US6354601B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 6, 1999 |
| Grant date | Mar 12, 2002 |
| Priority date | — |
| Expiry date | Jan 6, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67376
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A wafer container comprising an enclosure portion with a door frame defining an opening for insertion and removal of wafers and a door for insertion into the door frame for closing the opening and sealing with the door frame has an improved elastomeric seal. In a preferred embodiment of the invention an elastomeric seal encircles the door, is partially inset in a groove in the door, and has a cantilevered portion extending laterally outwardly from the door to engage a sealing surface of the door and a laterally displaced sealing surface of the door frame when the door is seated. Thus a seal can be provided that is effected almost totally by flexure of the cantilevered portion rather than by compression of the seal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.