Optical module, transmitter, receiver, optical switch, optical communication unit, add-and-drop multiplexing unit, and method for manufacturing the optical module
US6356692B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 7, 1999 |
| Grant date | Mar 12, 2002 |
| Priority date | — |
| Expiry date | Sep 7, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04J14/0305
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method is supported for aligning the height of a polymer waveguide to the height of a core layer of a semiconductor element in an optical module composed so as to mount the semiconductor element on its polymer waveguide substrate. In order to achieve the method, at first a waveguide is formed on the silicon substrate coated with an oxide film using a polymer whose refractive index is larger than that of the oxide film. The waveguide consists of a lower cladding layer, a core layer, and an upper cladding layer. The lower cladding layer is formed to be thinner than the conventional one and the height of the core layer is set to 5 to 10 &mgr;m. In this way, it is possible to fabricate an optical module in less process steps and at a lower cost than the conventional one.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.