Method to fabricate layered material compositions
US6358854B1 · kind B1 · utility
39Cited by
17References
43Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 21, 1999 |
| Grant date | Mar 19, 2002 |
| Priority date | — |
| Expiry date | Apr 21, 2019 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y20/00
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A new class of processes suited to the fabrication of layered material compositions is disclosed. Layered material compositions are typically three-dimensional structures which can be decomposed into a stack of structured layers. The best known examples are the photonic lattices. The present invention combines the characteristic features of photolithography and chemical-mechanical polishing to permit the direct and facile fabrication of, e.g., photonic lattices having photonic bandgaps in the 0.1-20&mgr; spectral range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.