Micromachined ultrasonic spiral arrays for medical diagnostic imaging
US6359367B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 6, 1999 |
| Grant date | Mar 19, 2002 |
| Priority date | — |
| Expiry date | Dec 6, 2019 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB06B1/0292
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Spiral, sparse spiral, substantially spiral or substantially sparse spiral transducer arrays comprising capacitive micromachined ultrasonic transducer elements disposed on a silicon substrate, and ultrasound imaging systems employing same. The transducer elements are respectively coupled to a plurality of amplifiers. Imager electronics are coupled to each of the amplifiers and drives the transducer elements and/or generates an output of the spiral transducer array. The amplifiers may be located in the silicon substrate containing the transducer elements, or on a separate substrate that is interconnected to the substrate containing the transducer elements using bumps, for example. Electrical interconnection to the transducer elements may readily be achieved without interfering with the acoustic output of the transducer elements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.