Antireflective coating and method of manufacturing same

US6359735B1 · kind B1 · utility

Assignee

• Max-Planck-Gesellschaft zur Föderung der Wissenschaften e.V. · US

Inventors

• Andreas Gombert · Glückstadt, DE
• Hansjorg Lerchenmuller · Obertal, DE

Key dates

• Filing date: Sep 15, 1999
• Grant date: Mar 19, 2002
• Expiry date: Sep 15, 2019

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T428/315
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

What is described here is an antireflective coating comprising a carrier layer consisting of an optically transparent material, which, at least on one surface side, presents antireflective properties with respect the wavelengths of the radiation incident on the surface. Moreover, methods of producing the coating are described.The invention excels itself by the provision that the antireflective surface side presents a surface roughness with stochastically distributed structures—the so-called macro structures—and that the macro structures are additionally modulated with surface structures presenting a periodic sequence—the so-called micro structures—which present period or cycle lengths smaller than the wave lengths of the radiation incident on the antireflective surface.