Optical head using micro-machined elements
US6360035B1 · kind B1 · utility
52Cited by
44References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 2, 2000 |
| Grant date | Mar 19, 2002 |
| Priority date | — |
| Expiry date | Jun 2, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B11/10569
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
An optical microswitch for use with a laser beam comprising a support body and first and second output fibers carried by the body. An electrostatic microactuator is carried by the body and extends in a plane. A micromirror is disposed out of the plane. The microactuator has a mirror holder coupled to the micromirror and at least one comb drive assembly coupled to the mirror holder for driving the micromirror about an axis of rotation extending perpendicular to the plane between a first position for reflecting the laser beam to the first output fiber and a second position for reflecting the laser beam to the second output fiber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.