Micromechanical device

US6360605B1 · kind B1 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Stefan Pinter · Reutlingen, DE
• Martin Schoefthaler · Reutlingen, DE
• Matthias Illing · Tübingen, DE
• Ralf Schellin · Reutlingen, DE
• Helmut Baumann · Gomaringen, DE
• Michael Fehrenbach · Rehoboth Beach, US
• Dietrich Schubert · Reutlingen, DE
• Georg Bischopink · Neckartenzlingen, DE

Key dates

• Filing date: Jun 30, 2000
• Grant date: Mar 26, 2002
• Expiry date: Jun 30, 2020

Classification

• Technology area (CPC G): Physics
• CPC primary: G01P2015/0814
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A micromechanical device, in particular an acceleration sensor, includes a seismic mass which is resiliently supported on a substrate via a first flexural spring device and which can be deflected in at least one direction by an acceleration, the deflection being able to be limited by a stop device. The stop device has at least one limit stop that is resiliently supported on the substrate via a second flexural spring device, the second flexural spring device having a greater flexural strength than the first flexural spring device.