Static mixer for a viscous liquid
US6361202B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 1, 2000 |
| Grant date | Mar 26, 2002 |
| Priority date | — |
| Expiry date | Dec 1, 2020 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01F2101/27
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A static mixer for a viscous liquid for use in a chemical mechanical polishing process is provided. The static mixer is constructed of an elongated cylindrical tank, an elongated cylindrical mixing sleeve having a multiplicity of mixing apertures therethrough situated inside the tank, a plurality of curvilinear feed tubes situated at a top of the tank cavity for feeding a mixture of a viscous liquid and a solvent into the tank cavity, a spiral plate mounted on the interior surface of the tank wall extending continuously from a top wall to a bottom wall of the tank cavity, and an outlet tube that is situated at the bottom of the tank cavity inside the mixing sleeve for outputting a mixture.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.