Patent · US Expired

Vacuum arc evaporator

US6361663B1 · kind B1 · utility

6Cited by

8References

23Claims

0Family size

Assignee

Max-Planck-Gesellschaft zur Föderung der Wissenschaften e.V. · US

Inventors

Jan Berthold · Dresden, DE
Thomas Witke · Dresden, DE
Peter Siemroth · Dresden, DE

Key dates

Filing date	May 19, 2000
Grant date	Mar 26, 2002
Priority date	—
Expiry date	May 19, 2020

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/32055
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

The invention relates to a vacuum arc evaporator with which a wide variety of substrates can be provided with various coatings or to which various systems of layers can be applied. The invention is intended to achieve an improvement in the quality of the layer, with increased material utilization and higher coating rate. A vacuum arc evaporator with a cathode of electrically conducting material and an anode for generating a plasma arranged in an evacuable housing is used for this purpose. The plasma is generated by an evaporation of the cathode material by means of arc discharge. The anode is enclosed by an insulator and is otherwise surrounded by cathode material on all sides.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.