Priming composition for bonding photoresists on substrates
US6361921B1 · kind B1 · utility
8Cited by
9References
30Claims
0Family size
Inventor
Key dates
| Filing date | Nov 12, 1998 |
| Grant date | Mar 26, 2002 |
| Priority date | — |
| Expiry date | Nov 12, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/11
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A priming concentrate composition is provided that may be deposited on a substrate and functions as an adhesion promoting composition for bonding a subsequently applied photoresist to the substrate. The composition contains, as an essential constituent, a polyelectrolyte having substituents derived from cyclic ethers, preferably epichlorohydrin and/or ethylene oxide. The priming composition can be applied to a stationary or moving substrate, as a concentrate or further diluted with an aqueous medium, by brushing, spraying or immersing and the like.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.