Acid functional polymers based on benzocyclobutene

US6361926B1 · kind B1 · utility

Assignee

• THE DOW CHEMICAL COMPANY · US

Inventors

• Ying H. So · Midland, US
• Robert A. DeVries · Midland, US
• Mitchell G. Dibbs · Midland, US
• Robert L. McGee · Midland, US
• Edward O. Shaffer, II · Midland, US
• Michael J. Radler · Midland, US
• Richard P. DeCaire · Auburn, US

Key dates

• Filing date: Oct 23, 1998
• Grant date: Mar 26, 2002
• Expiry date: Oct 23, 2018

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/095
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The invention is a curable cyclobutarene based polymer comprising acid functional pendant groups. The cured polymer displays excellent qualities of toughness, adhesion, dielectric constant, and low stress. The preferred system is soluble in an aqueous base and can be used to generate patterned films with excellent resolution without the need to handle organic developer solvents.