System and method for controlled delivery of liquefied gases from a bulk source
US6363728B1 · kind B1 · utility
18Cited by
10References
20Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Jun 20, 2000 |
| Grant date | Apr 2, 2002 |
| Priority date | — |
| Expiry date | Jun 20, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E60/32
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
Provided is a novel system and method for delivery of gas from a liquefied state. The system includes (a) a delivery vessel holding a bulk quantity of liquefied gas therein; (b) a heat exchanger disposed on the delivery vessel to provide or remove energy from the liquefied gas only; and (c) a pressure controller for monitoring and adjusting the energy delivered to the vessel. The system and method allow for controlled delivery of liquefied gas from a delivery vessel at a predetermined flow rate. Particular applicability is found in the delivery of gases to semiconductor process tools.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.