Method and apparatus for making aerogel film
US6364953B1 · kind B1 · utility
18Cited by
6References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 23, 2000 |
| Grant date | Apr 2, 2002 |
| Priority date | — |
| Expiry date | May 23, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/02282
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method for making an aerogel film includes the steps of performing a gelation reaction of a metal alkoxide on a substrate to prepare a substrate with a wet-gel film, and converting the wet-gel film into an aerogel film by a supercritical or sub-critical drying process of the substrate with the wet-gel film, wherein the degree of gelation of the wet-gel film is controlled to be a predetermined value at the start of the supercritical or sub-critical drying process. Aerogel films having uniform qualities are produced by the supercritical or sub-critical drying process in one lot.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.