Mems magnetically actuated switches and associated switching arrays
US6366186B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 20, 2000 |
| Grant date | Apr 2, 2002 |
| Priority date | — |
| Expiry date | Jan 20, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2036/0093
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A MEMS electrical cross-point switch is provided that includes a microelectronic substrate, a magnetic element attached to the microelectronic substrate that is free to move in a predetermined direction in response to a magnetic field and an electrical element connected to the magnetic element for movement therewith to selectively switch electric current. In one embodiment the magnetic element and the electrical element are connected via a tethering device that acts as a platform for the magnetic and electrical elements. The electrical cross-point switch may also comprise a clamping element that serves to lock the switch in an open or closed position to circumvent the magnetic actuation of the switch. In another embodiment, the invention provides for a MEMS electrical cross-point switching array that includes a microelectronic substrate, a magnetic field source in circuit with said microelectronic substrate, a plurality of first and second electrical lines disposed on the microelectronic substrate in an array formation, and a plurality of the in-plane MEMS electrical cross-point switches as described above disposed at the cross point of a first and second electrical line. In one em…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.