Patent · US Expired

Vacuum valve for separating two vacuum chambers

US6367770B1 · kind B1 · utility

15Cited by
4References
7Claims
0Family size

Assignee

Inventor

Key dates

Filing dateMar 23, 2000
Grant dateApr 9, 2002
Priority date
Expiry dateMar 23, 2020

Classification

  • Technology area (CPC F)Mechanical Engineering; Lighting; Heating
  • CPC primaryF16K51/02
  • WIPO fieldMechanical elements
  • WIPO sectorMechanical engineering

Abstract

A vacuum valve for separating two vacuum chambers and including a valve body having an opening and a valve seat having two sealing surfaces encompassing the valve opening, and a valve slide including a closing member displaceable transverse displaceable transverse to the flow direction of the valve, which is defined by the axial direction of the valve body opening, and having two wedge-shaped, tapering toward each other side surfaces, with the slide further including, elastomeric, circumferentially closed seals provided on the side surfaces of the closing member, and with respective sealing surfaces of the valve seat and respective side surfaces of the closing member extending parallel to each other and forming, over their entire extent, with flow direction of the valve, an angle greater than 45°.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.