Micromachined double resonator
US6367786B1 · kind B1 · utility
69Cited by
22References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 6, 2000 |
| Grant date | Apr 9, 2002 |
| Priority date | — |
| Expiry date | Jun 6, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5719
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micromachined resonator mountable to an external support structure has a proof mass coupled to a base structure by a first spring structure, the base structure having a plurality of electrodes, and a second spring structure coupling the base structure to the external support structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.