Vacuum pump with rotor supporting gas bearings
US6368082B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 5, 2000 |
| Grant date | Apr 9, 2002 |
| Priority date | — |
| Expiry date | Apr 5, 2020 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16C2360/45
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A vacuum pump including a housing having a suction flange and an outlet opening, a plurality of stationary and rotatable pump-active elements arranged in the housing, a rotor shaft for supporting the rotatable elements, a system of gas bearings for supporting the rotor shaft, with the gas bearings being substantially formed of stator elements with gas delivery conduits and gas outlets, and a system of resilient elements for connecting the stator elements with the bearing housing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.