Hydrogenating a layer of an antireflection coating
US6368470B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 29, 1999 |
| Grant date | Apr 9, 2002 |
| Priority date | — |
| Expiry date | Dec 29, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J29/896
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A multi-layer antireflection coating is formed to include successive layers of a medium refractive index material, a high refractive index material, and a low refractive index material. The medium refractive index layer is hydrogenated in order to tailor the refractive index of the material to below 1.99 and to increase clarity in transmission. Preferably, the hydrogen atomic concentration is at least 7 percent, more preferably exceeds 9 percent, and most preferably exceeds 18 percent. The three layers combine to form a three-layer antireflection coating, but the hydrogenation may be used in antireflection coatings having a greater or lesser number of layers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.