Method for determining the thickness of a layer of electrically conductive material
US6369565B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 28, 2000 |
| Grant date | Apr 9, 2002 |
| Priority date | — |
| Expiry date | Apr 28, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B7/105
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In a method for determining a thickness of a layer of electromagnetically conductive material, the measurement errors resulting from different quality of the basic material are eliminated. For each basic material, one dimensionless characteristic value (K) is ascertained. With the aid of a characteristic calibration curve, each characteristic value (K) can be assigned a correction factor (F), with which the measured value of the layer thickness (DM) can be converted into a real value of the layer thickness (D). Different electrical and magnetic properties, dictated by the different quality of the basic material, can thus be largely eliminated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.