Patent · US Expired

Pattern reading apparatus

US6369886B2 · kind B2 · utility

7Cited by
10References
15Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 30, 2001
Grant dateApr 9, 2002
Priority date
Expiry dateMar 30, 2021

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B27/021
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A pattern reading apparatus for reading a pattern from an object. The pattern reading apparatus includes a minute-area light source, an objective lens system, an imaging lens, and an imaging element. The objective lens system causes an illumination light beam from the light source to be incident on the object and converges the light beam reflected from the object. The imaging lens forms an image of the object using only a scattered component of light which has been reflected from the object. The imaging element is disposed at a position where the image of the pattern is imaged for reading the pattern.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.