Method and apparatus for surface profiling of materials and calibration of ablation lasers
US6369898B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 18, 2000 |
| Grant date | Apr 9, 2002 |
| Priority date | — |
| Expiry date | Jan 18, 2020 |
Classification
- Technology area (CPC A)Human Necessities
- CPC primaryA61F2009/00882
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
Method and apparatus are provided for measuring the surface profile of a sample. The method and apparatus provide light from a light source through a beam splitter to form two split beams, direct the split beams onto a sample surface and a reference surface respectively, reflect the split beams back through the beam splitter, and direct the split beams towards an imaging system. A surface profiling apparatus for measuring the surface profile of the sample is also provided. The apparatus includes a light source for generating a source beam, beam splitting means positioned in the path of the source beam for splitting the source beam into split beams, a reference surface, a sample surface allowing the split beams to traverse separate paths and return to the beam splitting means, reference surface positioning means for positioning the reference surface, and viewing means for imaging combined beams. An apparatus for calibrating a laser for the ablation of a material including the surface profiling apparatus is also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.