Optical waveguide probe and its manufacturing method
US6370306B1 · kind B1 · utility
74Cited by
5References
54Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 9, 1999 |
| Grant date | Apr 9, 2002 |
| Priority date | — |
| Expiry date | Nov 9, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/862
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention has an object to obtain an optical waveguide probe which is formed in a hook form to illuminate and detect light by a manufacture using a silicon process.This optical waveguide probe is formed in a hook form and structured by an optical waveguide 1 sharpened at a probe needle portion 5 and formed of dielectric and a substrate 2 supporting this optical waveguide 1. This optical waveguide 1 is formed overlying the substrate 2. The optical waveguide 1 is structured by a core 8 to transmit light and a cladding 9 smaller in refractive index than the core 8.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.