Capacitive sensor

US6370960B1 · kind B1 · utility

Assignee

• Micronas Intermetall GmbH · DE

Inventors

• Guenter Igel · Teningen, DE
• Ulrich Sieben · Meßkirch, DE
• Juergen Giehl · Kirchzarten, DE

Key dates

• Filing date: Apr 19, 1999
• Grant date: Apr 16, 2002
• Expiry date: Apr 19, 2019

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L9/0075
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A capacitive sensor including a first electrode and a second electrode which are disposed opposite each other in spaced-apart relationship to form a capacitor, the first electrode being disposed on a first substrate and the second electrode on a second substrate, the substrates being joined together at the sides of the electrodes, and the second substrate forming, in the area of the second electrode, a diaphragm deformable by pressure. An electronic signal processing device for processing the measurement signals is incorporated in one of the substrates below the electrode disposed thereon.