Knock mode scanning near-field optical microscope
US6373049B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 6, 1999 |
| Grant date | Apr 16, 2002 |
| Priority date | — |
| Expiry date | Aug 6, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/22
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A knock mode scanning near-field optical microscope comprises a light source member, an optical fiber probe connected at one end thereof with the light source member such that other end of the optical fiber probe forms a near-field point source of light, and that the optical fiber probe is attached with one end of a suspension arm member of an oscillation member. The oscillation member further has a piezoelectric ceramics, which is disposed on the suspension arm member, and is driven by a harmonic wave signal by a signal feedback member so as to bring about a change in amplitude and phase of the optical fiber probe in order to result in a feedback control.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.