Patent · US Expired

Micromechanical discrete time and frequency characterization of signals via resonator clamping and motion-arresting mechanisms

US6374677B1 · kind B1 · utility

17Cited by
8References
26Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 22, 2000
Grant dateApr 23, 2002
Priority date
Expiry dateFeb 22, 2020

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH03H2009/02511
  • WIPO fieldBasic communication processes
  • WIPO sectorElectrical engineering

Abstract

A micromechanical resonator including a motion arresting mechanism to rapidly damp the vibration of a resonator beginning at any given moment in time to remove vibration caused by previous events. An electrostatic clamp uses a bias voltage between an electrode and the resonator to damp the resonator and return it to its equilibrium position. A mechanical clamp includes an actuator that forces the mechanical clamp to contact the resonator. These micromechanical resonators facilitate condition based monitoring of complex electromechanical machines and components by allowing signature analysis in multiple temporal and frequency domains.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.