Adaptive GCIB for smoothing surfaces
US6375790B1 · kind B1 · utility
48Cited by
25References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 5, 1999 |
| Grant date | Apr 23, 2002 |
| Priority date | — |
| Expiry date | Oct 5, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/32115
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method and apparatus for adapting the nature of an ion beam during processing of the surface of a solid workpiece so as to improve the reduction of surface roughness (smoothing) by using a GCIB. In addition, the invention provides for surface smoothing in combination with etching to predetermined depths and surface contamination removal. Advantages are minimum required processing time, minimum remaining roughness of the final surface, and reduction in the amount of material that must be removed in order to attain a desired level of smoothness.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.