Replicating a nanoscale pattern
US6375870B1 · kind B1 · utility
151Cited by
5References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 17, 1999 |
| Grant date | Apr 23, 2002 |
| Priority date | — |
| Expiry date | Nov 17, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/001
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of replicating a nanoscale pattern which comprises forming the pattern on the outer surface of a cylindrical roller, providing a surface upon which the pattern is to be replicated, and transferring the nanoscale pattern from the cylindrical roller onto the surface to provide at least one replication of the pattern on that surface. The roller is adapted to carry the pattern on its outer surface and transfer the pattern to a substrate. The ultimate product may be a grating polarizer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.