Method and device for treating exhaust gas
US6375911B1 · kind B1 · utility
2Cited by
9References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 13, 1999 |
| Grant date | Apr 23, 2002 |
| Priority date | — |
| Expiry date | Aug 13, 2019 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01D53/8659
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A process and an apparatus for treating an exhaust gas, in which a raw gas and high-boiling intermediate products contained in the exhaust gas let out from a CVD system employing a silicon-containing gas is brought into contact with a transition metal such as nickel or a silicide of such transition metals to decompose or convert them into stable halides, followed by detoxication treatment of the harmful components contained in the exhaust gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.