Laser machining apparatus with a rotatable phase grating
US6376799B1 · kind B1 · utility
15Cited by
10References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 27, 1999 |
| Grant date | Apr 23, 2002 |
| Priority date | — |
| Expiry date | May 27, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/13439
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A laser machining apparatus for performing high-precision machining on a thin film deposited on a substrate, such as a liquid crystal panel. The apparatus includes a pulse laser generator for emitting a laser beam, a driver for driving the pulse laser generator, a phase grating for dividing the laser beam; a rotary stage for rotating the phase grating to control the direction of the beams illuminating an object, and a spatial filter (element 2101).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.