Projection having a micro-aperture, probe or multi-probe having such a projection and surface scanner, aligner or information processor comprising such a probe
US6376833B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 25, 1998 |
| Grant date | Apr 23, 2002 |
| Priority date | — |
| Expiry date | Aug 25, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/22
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A projection having a micro-aperture on the tip is formed. Firstly, a projection or a dent is formed on a substrate. Then, a film is formed on the surface of the projection or of the opposite side of the dent so as to make the film thin at and near the tip of the projection or the dent. The film is subsequently etched to expose the tip, which is further etched to produce a micro-aperture. Preferably, the film is formed of a thermo-plastic material such as glass, especially phospho-silicate glass to produce a viscous flow under heated conditions. The probe having a micro-aperture can be used for a surface scanner, an aligner or an information processor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.