Planar waveguide devices and fiber attachment
US6377732B1 · kind B1 · utility
7Cited by
23References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 21, 2000 |
| Grant date | Apr 23, 2002 |
| Priority date | — |
| Expiry date | Jan 21, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12176
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
According to the present invention, an optical waveguide is provided on a silica or silicon substrate using MPACVD and ICP etching processes. Optical fiber is coupled to the waveguide by positioning the fiber in a groove formed in the waveguide and compressing a top lid on the fiber. The top lid is secured to the waveguide and fiber by an epoxy or a solder. In a solder based embodiment, the cladding of the fiber may have a metallization evaporated thereon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.