High-frequency ion source
US6378290B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 10, 2000 |
| Grant date | Apr 30, 2002 |
| Priority date | — |
| Expiry date | Oct 10, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/54
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A high-frequency ion source, in particular a high-frequency ion engine, includes a discharge chamber or container (2), a source (9) providing a gas to be ionized, a gas inlet (10) discharging the gas from the source into the discharge container (2) to be ionized therein, a high-frequency coil (3) surrounding the discharge container (2), and a high-frequency generator (4) connected to the high-frequency coil (3), for generating a high-frequency electromagnetic alternating field that ionizes the gas present in the discharge container (2). Furthermore, an acceleration grid (11) connected to an acceleration voltage source (12) is arranged at the open end of the discharge container (2) so as to accelerate the ions generated in the discharge container (2) in the form of an ion beam emanating from the discharge container (2). The shape of the discharge container (2) in longitudinal section is tapered to become smaller toward the closed end (6) opposite the open end (5) of the container. Also, the high-frequency coil (3) at least partly surrounds the discharge container (2) in the tapered section.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.