Angular velocity sensor
US6378369B1 · kind B1 · utility
14Cited by
5References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 28, 1999 |
| Grant date | Apr 30, 2002 |
| Priority date | — |
| Expiry date | Dec 28, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5719
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An angular velocity sensor includes a support body, a plurality of beams individually supported by the support body, and a coupling part with which a plurality of the beams are commonly coupled, and a vibrating weight formed on the coupling part, wherein each beam comprises a wide beam part and a narrow beam part narrower than the wide beam part.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.