Paddle design for plating bath
US6379511B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 23, 1999 |
| Grant date | Apr 30, 2002 |
| Priority date | — |
| Expiry date | Sep 23, 2019 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC25D17/007
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An electroplating system circulates solution between an anode and a workpiece mounted to a cathode. A shaped agitation paddle is reciprocated immediately adjacent to the cathode workpiece to improve performance of the system. The paddle is an elongated prism having a generally flat side that is parallel to the workpiece. The flat side has a fluid port connected to a pump. The solution may be pumped with either positive pressure to force the solution against the surface of the workpiece, or negative pressure to draw the solution away from the surface of the workpiece. In an alternate embodiment, the cathode workpiece is rotated in the solution above an anode with a stationary, shaped paddle in between them.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.