Micro-electromechanical arrangement
US6380600B1 · kind B1 · utility
7Cited by
4References
34Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 5, 2000 |
| Grant date | Apr 30, 2002 |
| Priority date | — |
| Expiry date | Aug 9, 2020 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H9/50
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present invention refers to a variable capacitor comprising a first conductive layer, a second conductive layer and a semiconductor layer, the first and second layers being arranged to be displaced relative to each other under the influence of an electrostatically generated force. The semiconductor layer constitutes a voltage generator, which when exposed to a radiation produces a voltage for charging the first and second conductive layers and induces the electrostatically generated force.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.