Methods for processing, optimization, calibration and display of measured dielectrometry signals using property estimation grids
US6380747B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 12, 1999 |
| Grant date | Apr 30, 2002 |
| Priority date | — |
| Expiry date | May 12, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R27/2623
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method is disclosed for processing, optimization, calibration, and display of measured dielectrometry signals. A property estimator is coupled by way of instrumentation to an electrode structure and translates sensed electromagnetic responses into estimates of one or more preselected properties or dimensions of the material, such as dielectric permittivity and ohmic conductivity, layer thickness, or other physical properties that affect dielectric properties, or presence of other lossy dielectric or metallic objects. A dielectrometry sensor is disclosed which can be connected in various ways to have different effective penetration depths of electric fields but with all configurations having the same air-gap, fluid gap, or shim lift-off height, thereby greatly improving the performance of the property estimators by decreasing the number of unknowns. The sensor geometry consist of a periodic structure with, at any one time, a single sensing element that provides for multiple wavelength within the same sensor footprint.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.