Light modulating device
US6381022B1 · kind B1 · utility
162Cited by
1References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 27, 2000 |
| Grant date | Apr 30, 2002 |
| Priority date | — |
| Expiry date | Jul 27, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J3/0256
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to microfabricated spectrometers including methods of making and using same. Microspectrometers can be formed in a single chip in which detectors and light sources can be monolithically integrated. The microspectrometer can be integrated into a sensor system to measure the optical and physical properties of solids and fluids.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.