Controlling laser polarization
US6381259B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 29, 2001 |
| Grant date | Apr 30, 2002 |
| Priority date | — |
| Expiry date | Jan 29, 2021 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K2103/12
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A laser polarization control apparatus includes a polarization modifying device and a controller. The polarization modifying device receives a laser beam and modifies the polarization of the laser beam. The controller adjusts an input to the polarization modifying device in order to control modification of the polarization of the laser beam based on alignment of a structure to be processed by the laser beam. The polarization modifying device is configured for incorporation into a laser processing system that produces the laser beam received by the polarization modifying device and that focuses the laser beam modified by the polarization modifying device onto a workpiece that includes the structure to be processed by the laser beam. An analyzer tool receives the laser beam modified by the polarization modification device and measures the modification of the polarization of the laser beam by the polarization modification device. A plurality of inputs are applied to the polarization modifying device to control modification of the polarization of the laser beam, and the laser beam modified by the polarization modification device is analyzed using the analyzer tool in order to measure m…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.