Patent · US Expired

Wafer container box

US6382419B1 · kind B1 · utility

48Cited by
11References
6Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 19, 2000
Grant dateMay 7, 2002
Priority date
Expiry dateApr 19, 2020

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S206/832
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Disclosed is a container box for storage and transportation of wafer materials or other precision substrate plates in the electronic industries as well as for automatic loading of the wafer materials on a wafer-processing machine. Several accessory parts can be mounted on the container box as selected according to the usage conditions of the container box so as to accomplish improvements in the weight decrease, handleableness and storage. The wafer container box consists of a box body having a front opening and a covering thereon and comprises an upper mounting means provided on the top wall of the box body for supporting a robotic flange, a lower side mounting means provided on the outer surface of each of the side walls of the box body for supporting a side rail, and a side mounting means provided on the outer surface of each of the oppositely facing side walls of the box body for supporting a manual handle, each in a demountable fashion.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.