Method and apparatus for measuring a wavefront
US6382793B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 20, 2000 |
| Grant date | May 7, 2002 |
| Priority date | — |
| Expiry date | May 20, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J9/00
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
Embodiments of the present invention provide method and apparatus for measuring a wavefront of a beam of radiation. In particular, one embodiment of the present invention is an apparatus for measuring a wavefront of a beam of radiation at a first plane which includes: (a) relay optics adapted to relay the wavefront from the first plane to a second plane; (b) a moving boundary locus apparatus disposed between the first and second planes; (c) a two-dimensional photodetector array comprising—at least 4×4 photodetector elements disposed in the second plane, wherein each photodetector element produces a time varying signal in response to movement of a portion of the moving boundary locus apparatus; (d) a synchronizer adapted to synchronize each of the time varying signals with a position of the portion of the moving boundary locus apparatus; and (e) an analyzer, responsive to synchronized time varying signals output from the synchronizer, to measure the wavefront of the beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.