Projection optical apparatus
US6382799B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 21, 2000 |
| Grant date | May 7, 2002 |
| Priority date | — |
| Expiry date | Nov 8, 2020 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03B21/2066
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A projection optical apparatus has a light source for emitting light, an illumination optical system for emitting as illumination light the light radiated from the light source, a Digital Micromirror Device™, having a plurality of micromirrors, for separating the illumination light into signal light and unnecessary light by varying, in accordance with a signal, the angles at which the individual micromirrors reflect the illumination light shone thereon, a total internal reflection prism composed of a first prism for totally reflecting and thereby directing the illumination light exiting from the illumination optical system to the Digital Micromirror Device™ and a second prism for transmitting the signal light reflected from the Digital Micromirror Device™, and a projection optical system for projecting the signal light transmitted through the second prism onto a projection surface. Here, the f/number Fa of the illumination optical system on the Digital Micromirror Device™ side thereof, the distance xa from the Digital Micromirror Device™ to the Digital Micromirror Device™ side pupil of the illumination optical system, the distance L from the opti…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.