Reclamation and separation of perfluorocarbons using condensation
US6383257B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 4, 2000 |
| Grant date | May 7, 2002 |
| Priority date | — |
| Expiry date | Apr 4, 2020 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02C20/30
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An apparatus and process for separating perfluorocarbon compounds from a gas mixture passes an incoming stream of a gas into a cold trap, the gas stream including a plurality of perfluorocarbon compounds. The gas mixture is cooled within the cold trap to a temperature below −100° C. to produce a condensate that is enriched in at least one perfluorocarbon compound and a non-condensed stream from which the condensate was separated. The condensate is withdrawn from the cold trap. The condensate may be withdrawn by warming the cold trap to vaporize the condensate and thereafter flowing the vaporized condensate into a storage vessel. The non-condensed stream may be vented to the atmosphere, re-circulated into the cold trap or flowed through subsequent separation processes to extract additional perfluorocarbon compounds.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.